Mechanistic Understanding of Material Detachment During Micro-Scale Polishing

dc.contributor.author Che, W.
dc.contributor.author Guo, Y.
dc.contributor.author Chandra, Abhijit
dc.contributor.author Bastawros, Ashraf
dc.contributor.author Bastawros, Ashraf
dc.contributor.department Aerospace Engineering
dc.contributor.department Mechanical Engineering
dc.date 2018-02-17T14:24:57.000
dc.date.accessioned 2020-06-29T22:46:09Z
dc.date.available 2020-06-29T22:46:09Z
dc.date.copyright Wed Jan 01 00:00:00 UTC 2003
dc.date.issued 2003-11-01
dc.description.abstract <p>A combined experimental and modeling approach has been devised to understand the material removal mechanism during abrasion of ductile copper discs. First, single grit scratch intersection experiments are conducted at the micro-scale (with 1-30 mm depth of cut). This is followed by FEM analysis. Then a simple analytical model is developed, and the model prediction is verified against experimental observations and results from numerical simulations. A characteristic material detachment length is correlated between experimental observations and model predictions. The insights gained from this exercise may be used to develop a mechanistic model of material removal in chemical mechanical polishing (CMP) of ductile materials.</p>
dc.description.comments <p>This article is from <em>Journal of Manufacturing Science and Engineering</em> 125 (2003): 731, doi: <a href="http://dx.doi.org/10.1115/1.1619964" target="_blank">10.1115/1.1619964</a>. Posted with permission.</p>
dc.format.mimetype application/pdf
dc.identifier archive/lib.dr.iastate.edu/aere_pubs/65/
dc.identifier.articleid 1065
dc.identifier.contextkey 8296501
dc.identifier.s3bucket isulib-bepress-aws-west
dc.identifier.submissionpath aere_pubs/65
dc.identifier.uri https://dr.lib.iastate.edu/handle/20.500.12876/2067
dc.language.iso en
dc.source.bitstream archive/lib.dr.iastate.edu/aere_pubs/65/2003_BastawrosAF_MechanisticUnderstandingMaterial.pdf|||Sat Jan 15 01:23:36 UTC 2022
dc.source.uri 10.1115/1.1619964
dc.subject.disciplines Aerospace Engineering
dc.subject.disciplines Mechanical Engineering
dc.title Mechanistic Understanding of Material Detachment During Micro-Scale Polishing
dc.type article
dc.type.genre article
dspace.entity.type Publication
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relation.isOrgUnitOfPublication 6d38ab0f-8cc2-4ad3-90b1-67a60c5a6f59
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