Mechanistic Understanding of Material Detachment During Micro-Scale Polishing Che, W. Guo, Y. Chandra, Abhijit Bastawros, Ashraf Bastawros, Ashraf
dc.contributor.department Aerospace Engineering
dc.contributor.department Mechanical Engineering 2018-02-17T14:24:57.000 2020-06-29T22:46:09Z 2020-06-29T22:46:09Z Wed Jan 01 00:00:00 UTC 2003 2003-11-01
dc.description.abstract <p>A combined experimental and modeling approach has been devised to understand the material removal mechanism during abrasion of ductile copper discs. First, single grit scratch intersection experiments are conducted at the micro-scale (with 1-30 mm depth of cut). This is followed by FEM analysis. Then a simple analytical model is developed, and the model prediction is verified against experimental observations and results from numerical simulations. A characteristic material detachment length is correlated between experimental observations and model predictions. The insights gained from this exercise may be used to develop a mechanistic model of material removal in chemical mechanical polishing (CMP) of ductile materials.</p>
dc.description.comments <p>This article is from <em>Journal of Manufacturing Science and Engineering</em> 125 (2003): 731, doi: <a href="" target="_blank">10.1115/1.1619964</a>. Posted with permission.</p>
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dc.identifier.articleid 1065
dc.identifier.contextkey 8296501
dc.identifier.s3bucket isulib-bepress-aws-west
dc.identifier.submissionpath aere_pubs/65
dc.language.iso en
dc.source.bitstream archive/|||Sat Jan 15 01:23:36 UTC 2022
dc.source.uri 10.1115/1.1619964
dc.subject.disciplines Aerospace Engineering
dc.subject.disciplines Mechanical Engineering
dc.title Mechanistic Understanding of Material Detachment During Micro-Scale Polishing
dc.type article
dc.type.genre article
dspace.entity.type Publication
relation.isAuthorOfPublication 5dc5d008-4c85-41c9-b47c-7c55b44ca802
relation.isOrgUnitOfPublication 047b23ca-7bd7-4194-b084-c4181d33d95d
relation.isOrgUnitOfPublication 6d38ab0f-8cc2-4ad3-90b1-67a60c5a6f59
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