This thesis is organized into a chapter on literature review, three papers and a chapter on conclusions. The first paper deals with the femtosecond pulsed laser deposition and fabrication of micromotor on Teflon thin films along with a comparison of the traditional excimer deposition. The second paper deals with the femtosecond pulsed laser deposition and fabrication of microgripper on 3C-SiC along with a comparison of films deposited by excimer laser and atmospheric chemical vapor deposition methods. The third paper deals with the details of fabrication of a microgripper on 3C-SiC thin film.