Recent Progress in Materials Studies with Acoustic Microscopy Bray, R. Quate, C. 2018-02-13T18:27:43.000 2020-06-30T01:29:14Z 2020-06-30T01:29:14Z Thu Jan 01 00:00:00 UTC 1981 2013-12-03 1981-09-01
dc.description.abstract <p>The scanning acoustic microscope operating in water with a frequency of 2.5 GHz (wavelength 6000 Å) has been used to nondestructively characterize materials and devices in a manner inaccessible to optical and electron microscopy. Adhesion of thin films of Cr on glass (optical masks for photolithography) is shown to be a strong source of acoustic microscope contrast. This offers nondestructive evaluation of film adhesion on a microscopic scale for the first time. Study of intentionally damaged integrated circuit structures reveals damage features not visible in optical microscopy. Microscopic subsurface imaging of composite structures is presented, as in other recent acoustic microscope imaging of materials. Recent theoretical work in acoustic response of layered materials is reviewed.</p>
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dc.identifier archive/
dc.identifier.articleid 1035
dc.identifier.contextkey 4872110
dc.identifier.s3bucket isulib-bepress-aws-west
dc.identifier.submissionpath cnde_yellowjackets_1981/36
dc.language.iso en
dc.relation.ispartofseries Interdisciplinary Program for Quantitative Flaw Definition Annual Reports
dc.source.bitstream archive/|||Fri Jan 14 23:46:12 UTC 2022
dc.subject.disciplines Materials Science and Engineering
dc.subject.keywords Nondestructive Evaluation
dc.title Recent Progress in Materials Studies with Acoustic Microscopy
dc.type article
dc.type.genre 08_ultrasonic_imaging_and_microscope
dspace.entity.type Publication
relation.isSeriesOfPublication 43920e40-d127-4f4c-9087-dc709815fe7f
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