Patterns of Ag nanostructures can be created on the Si(111)–(√3 × √3)R30°-Ag surface, using a simple two-step process in ultrahigh vacuum. First, patterns are created using the tip of a scanning tunneling microscope. Second, Ag is deposited at room temperature. The Ag diffuses over long distances on the surface and selectively aggregates at the patterned regions. The size of the Ag features is ∼3–4 nm.