Large-Scale Synthesis of Colloidal Si Nanocrystals and Their Helium Plasma Processing into Spin-On, Carbon-Free Nanocrystalline Si Films

dc.contributor.author Mohapatra, Pratyasha
dc.contributor.author Mendivelso-Perez, Deyny
dc.contributor.author Bobbitt, Jonathan
dc.contributor.author Shaw, Santosh
dc.contributor.author Smith, Emily
dc.contributor.author Yuan, Bin
dc.contributor.author Tian, Xinchun
dc.contributor.author Smith, Emily
dc.contributor.author Cademartiri, Ludovico
dc.contributor.department Ames Laboratory
dc.contributor.department Chemical and Biological Engineering
dc.contributor.department Chemistry
dc.contributor.department Chemical and Biological Engineering
dc.date 2019-09-22T02:25:43.000
dc.date.accessioned 2020-06-29T23:21:21Z
dc.date.available 2020-06-29T23:21:21Z
dc.date.embargo 2019-05-30
dc.date.issued 2018-05-30
dc.description.abstract <p>This paper describes a simple approach to the large-scale synthesis of colloidal Si nanocrystals and their processing into spin-on carbon-free nanocrystalline Si films. The synthesized silicon nanoparticles are capped with decene, dispersed in hexane, and deposited on silicon substrates. The deposited films are exposed to nonoxidizing room-temperature He plasma to remove the organic ligands without adversely affecting the silicon nanoparticles to form crack-free thin films. We further show that the reactive ion etching rate in these films is 1.87 times faster than that for single-crystalline Si, consistent with a simple geometric argument that accounts for the nanoscale roughness caused by the nanoparticle shape.</p>
dc.identifier archive/lib.dr.iastate.edu/ameslab_manuscripts/206/
dc.identifier.articleid 1205
dc.identifier.contextkey 12516093
dc.identifier.s3bucket isulib-bepress-aws-west
dc.identifier.submissionpath ameslab_manuscripts/206
dc.identifier.uri https://dr.lib.iastate.edu/handle/20.500.12876/7130
dc.language.iso en
dc.relation.ispartofseries IS-J 9706
dc.source.bitstream archive/lib.dr.iastate.edu/ameslab_manuscripts/206/IS_J_9706.pdf|||Fri Jan 14 22:26:27 UTC 2022
dc.source.uri 10.1021/acsami.8b03771
dc.subject.disciplines Materials Chemistry
dc.subject.disciplines Nanoscience and Nanotechnology
dc.subject.disciplines Semiconductor and Optical Materials
dc.subject.keywords colloidal nanoparticle
dc.subject.keywords large scale synthesis
dc.subject.keywords nanocrystalline Si film
dc.subject.keywords helium plasma
dc.subject.keywords carbon free
dc.title Large-Scale Synthesis of Colloidal Si Nanocrystals and Their Helium Plasma Processing into Spin-On, Carbon-Free Nanocrystalline Si Films
dc.type article
dc.type.genre article
dspace.entity.type Publication
relation.isAuthorOfPublication 1593ba6f-2eb3-4290-ab73-86b7601506fa
relation.isOrgUnitOfPublication 25913818-6714-4be5-89a6-f70c8facdf7e
relation.isOrgUnitOfPublication 86545861-382c-4c15-8c52-eb8e9afe6b75
relation.isOrgUnitOfPublication 42864f6e-7a3d-4be3-8b5a-0ae3c3830a11
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