Acoustoelastic stress measurement has been established for bulk shear wave, in particular with birefringence of the wave. This method, however, evaluates only average stress over thickness of a sample. Some preliminary studies have been reported for local surface stress measurement with Rayleigh or leaky Rayleigh wave. An approach using an acoustic microscope operated with burst waves over 100MHz [1, 2] is markedly sensitive to surface roughness and anisotropy of grains due to very short wave length of the wave. The other approach using contact transducers needs long propagation distance [3, 4].