Recent advances in scanning photoacoustic microscopy (SPAM) for NDE are described. Conventional and phase-contrast modes are used to detect a well-characterized subsurface flaw in Al, and the results are shown to be in good agreement with calculations based upon a three-dimensional thermal diffusion model. Applications of the technique are given which demonstrate surface and subsurface flaw detection in complex-shaped ceramic turbine parts. Photoacoustic pictures are presented of an integrated circuit semiconductor chip and show 6 μm resolution.