Study of radio frequency excited argon plasma in a cathodic sputtering system

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r_7710344.pdf (2.8 MB)
Date
1976
Authors
Tolliver, Charlie
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Altmetrics
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https://doi.org/10.31274/rtd-180813-17369
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https://dr.lib.iastate.edu/handle/20.500.12876/78504
Subject Categories
Electrical and Electronics
Oil, Gas, and Energy
Keywords
Electrical engineering
Copyright
Thu Jan 01 00:00:00 UTC 1976
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