Study of radio frequency excited argon plasma in a cathodic sputtering system
| dc.contributor.author | Tolliver, Charlie | |
| dc.contributor.department | Electrical and Computer Engineering | |
| dc.date | 2018-08-16T07:56:17.000 | |
| dc.date.accessioned | 2020-07-02T05:50:29Z | |
| dc.date.available | 2020-07-02T05:50:29Z | |
| dc.date.copyright | Thu Jan 01 00:00:00 UTC 1976 | |
| dc.date.issued | 1976 | |
| dc.format.mimetype | application/pdf | |
| dc.identifier | archive/lib.dr.iastate.edu/rtd/5807/ | |
| dc.identifier.articleid | 6806 | |
| dc.identifier.contextkey | 6219895 | |
| dc.identifier.doi | https://doi.org/10.31274/rtd-180813-17369 | |
| dc.identifier.s3bucket | isulib-bepress-aws-west | |
| dc.identifier.submissionpath | rtd/5807 | |
| dc.identifier.uri | https://dr.lib.iastate.edu/handle/20.500.12876/78504 | |
| dc.language.iso | en | |
| dc.source.bitstream | archive/lib.dr.iastate.edu/rtd/5807/r_7710344.pdf|||Sat Jan 15 01:01:41 UTC 2022 | |
| dc.subject.disciplines | Electrical and Electronics | |
| dc.subject.disciplines | Oil, Gas, and Energy | |
| dc.subject.keywords | Electrical engineering | |
| dc.title | Study of radio frequency excited argon plasma in a cathodic sputtering system | |
| dc.type | article | |
| dc.type.genre | dissertation | |
| dspace.entity.type | Publication | |
| relation.isOrgUnitOfPublication | a75a044c-d11e-44cd-af4f-dab1d83339ff | |
| thesis.degree.level | dissertation | |
| thesis.degree.name | Doctor of Philosophy |
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