Measurements of Thin-Film Elastic Properties by Line-Focus Acoustic Microscopy Lee, Yung-Chun Li, Wei Achenbach, Jan 2018-02-14T06:02:23.000 2020-06-30T06:43:04Z 2020-06-30T06:43:04Z Sun Jan 01 00:00:00 UTC 1995 1995
dc.description.abstract <p>Quantitative acoustic microscopy has been used to measure the velocity of leaky surface acoustic waves (SAWs) [1,2]. This technique measures a V(z) curve, which is a record of the voltage output V of the transducer as a function of the distance z between the acoustic lens and the specimen. Line-focus acoustic microscopy (LFAM) allows the measurement of the SAW velocity in specified directions. In earlier papers, LFAM has been used to determine the elastic constants of isotropic thin films [3,4] and anisotropic thin films [5–7]. The directional variation of the SAW velocity of a thin-layer/anisotropic substrate configuration may be quite different from that of the bare substrate. It follows that this variation can be used to determine the elastic properties of thin films.</p>
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dc.identifier archive/
dc.identifier.articleid 2591
dc.identifier.contextkey 5800178
dc.identifier.s3bucket isulib-bepress-aws-west
dc.identifier.submissionpath qnde/1995/allcontent/230
dc.language.iso en
dc.source.bitstream archive/|||Fri Jan 14 22:47:09 UTC 2022
dc.source.uri 10.1007/978-1-4615-1987-4_230
dc.title Measurements of Thin-Film Elastic Properties by Line-Focus Acoustic Microscopy
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dc.type.genre article
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