Measurements of Thin-Film Elastic Properties by Line-Focus Acoustic Microscopy

dc.contributor.author Lee, Yung-Chun
dc.contributor.author Li, Wei
dc.contributor.author Achenbach, Jan
dc.date 2018-02-14T06:02:23.000
dc.date.accessioned 2020-06-30T06:43:04Z
dc.date.available 2020-06-30T06:43:04Z
dc.date.copyright Sun Jan 01 00:00:00 UTC 1995
dc.date.issued 1995
dc.description.abstract <p>Quantitative acoustic microscopy has been used to measure the velocity of leaky surface acoustic waves (SAWs) [1,2]. This technique measures a V(z) curve, which is a record of the voltage output V of the transducer as a function of the distance z between the acoustic lens and the specimen. Line-focus acoustic microscopy (LFAM) allows the measurement of the SAW velocity in specified directions. In earlier papers, LFAM has been used to determine the elastic constants of isotropic thin films [3,4] and anisotropic thin films [5–7]. The directional variation of the SAW velocity of a thin-layer/anisotropic substrate configuration may be quite different from that of the bare substrate. It follows that this variation can be used to determine the elastic properties of thin films.</p>
dc.format.mimetype application/pdf
dc.identifier archive/lib.dr.iastate.edu/qnde/1995/allcontent/230/
dc.identifier.articleid 2591
dc.identifier.contextkey 5800178
dc.identifier.s3bucket isulib-bepress-aws-west
dc.identifier.submissionpath qnde/1995/allcontent/230
dc.identifier.uri https://dr.lib.iastate.edu/handle/20.500.12876/60494
dc.language.iso en
dc.source.bitstream archive/lib.dr.iastate.edu/qnde/1995/allcontent/230/1995_Lee_MeasurementsThin.pdf|||Fri Jan 14 22:47:09 UTC 2022
dc.source.uri 10.1007/978-1-4615-1987-4_230
dc.title Measurements of Thin-Film Elastic Properties by Line-Focus Acoustic Microscopy
dc.type event
dc.type.genre article
dspace.entity.type Publication
File
Original bundle
Now showing 1 - 1 of 1
Name:
1995_Lee_MeasurementsThin.pdf
Size:
936.86 KB
Format:
Adobe Portable Document Format
Description: