Scanning Differential Contrast Microscopy
Date
1987
Authors
Kino, G.
Chou, C.-H.
Corle, T.
Hobbs, P.
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Abstract
We have been carrying out research on two types of scanning optical microscopes with the aim of measuring not only the width of surface features, but also the thickness of thin films and surface profiles.
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Sat Aug 01 00:00:00 UTC 1987